Regensburg 2019 – wissenschaftliches Programm
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MA: Fachverband Magnetismus
MA 32: Magnetic recording, sensors and other devices
MA 32.3: Vortrag
Mittwoch, 3. April 2019, 12:30–12:45, H53
Nano Hall Sensors for Scanning Magnetic Field Microscopy — •Manuela Gerken1, Davood Momeni Pakdehi1, Thomas Weimann1, André Müller1, Aurélie Solignac2, Andrin Doll2, Klaus Pierz1, Frank Hohls1, Sibylle Sievers1, and Hans Werner Schumacher1 — 1Physikalisch-Technische Bundesanstalt (PTB), Braunschweig, Germany — 2SPEC, CEA, CNRS, Université Paris-Saclay, CEA Saclay, Gif sur Yvette Cedex, France
Within the overall miniaturization, also magnetic devices are being scaled down into the micro- and nanometer range. This leads to an increasing demand for high-resolution quantitative metrology to measure the resulting inhomogeneous device stray fields. One promising approach is scanning magnetic field microscopy using nanoscale Hall sensors. Here, we will present our results on the development of gold and graphene Hall sensors with active areas down to 50 nm x 50 nm.
The sensors were fabricated using combinations of electron beam lithography, lift-off process and etching of epitaxially grown graphene. To investigate sensor sensitivity as well as stability they were characterized in homogeneous magnetic fields up to 250 mT. For the sensor calibration we will give an estimation of the uncertainty budget. Finally, we will present a concept how to fabricate gold Hall sensors on cantilevers to integrate them into a metrological AFM for quantitative and high precision scanning Hall magnetometry.