Regensburg 2019 – wissenschaftliches Programm

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MM: Fachverband Metall- und Materialphysik

MM 9: Topical session (Symposium MM): Correlative and in-situ Microscopy in Materials Research

MM 9.5: Vortrag

Montag, 1. April 2019, 17:00–17:15, H44

Combined in situ heating and diffraction in Scanning Electron Microscopy — •Peter Denninger, Peter Schweizer, Christian Dolle, and Erdmann Spiecker — Friedrich-Alexander University Erlangen-Nuremberg, Cauerstrasse 6, 91058 Erlangen

In this work we introduce a novel heating and diffraction setup in the SEM enabling the simultaneous acquisition of real space and reciprocal space information in situ. Low Energy Nano Diffraction (LEND) in transmission is based on the combination of a fluorescent screen positioned below the sample with a dedicated CMOS camera. The technique has been implemented and successfully tested on graphene and polycrystalline gold. For graphene a hexagonal spot like diffraction pattern can be obtained due to the small convergence angle (hence nano diffraction) typically encountered in SEM. For gold the same is possible for very thin films. With increasing film thickness the contribution of dynamical scattering becomes more prevalent, resulting in familiar transmission Kikuchi diffraction (TKD) patterns. With our setup we could successfully demonstrate LEND down to an energy of 0.5 keV (hence low energy).

A custom-built heating stage for DENS Solution Wildfire Nano-Chips in combination with the LEND setup offers combined in situ heating, imaging and transmission diffraction in SEM. To showcase the power of this technique the process of solid state dewetting and the aluminum induced Layer Exchange (AlILE) will be shown. In both those processes the combined detection of real- and reciprocal space information lead to new insights about their mechanisms.