Regensburg 2019 – wissenschaftliches Programm
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VA: Fachverband Vakuumphysik und Vakuumtechnik
VA 5: Vacuum Measurement in Technical Applications
VA 5.1: Hauptvortrag
Montag, 1. April 2019, 15:25–16:05, H6
Outgassing rate measurements in practice: feasibility and comparability — •Michael Flämmich1, Francisc Haidu1, Christian Worsch1, Marcel Kleßen2, Klaus Bergner1, and Ute Bergner1 — 1VACOM Vakuum Komponenten & Messtechnik GmbH, Germany — 2TREAMS GmbH, Germany
Outgassing rate measurements have long been utilized for the qualification of the vacuum suitability of materials in laboratories worldwide. At VACOM these measurements are fully integrated in the process chain of the production and cleaning of vacuum components. By this means, outgassing rate measurements are routinely performed with residual gas analysis (RGA) systems (utilizing either the throughput or the box-in-box method) in order to verify the cleanliness of the parts, components and assemblies. In order to perform reliable, comparable and quantitative RGA measurements utilizing different RGA systems/tools, each system/tool itself needs to be calibrated, where the calibration or rather the adjustment of the utilized quadrupole mass spectrometer (QMS) is finally tipping the scales.
In this talk, we present some results of a comparison of different types of commercially available QMS that have been investigated with respect to their feasibility in qualitative and quantitative outgassing rate measurements. Although these QMS exhibit relevant differences in design (e.g. ion source, single-/double-/triple-filter, rod system, ...) that yield serious differences in their characteristics (e.g. dynamic range, (mass specific) sensitivity, detection limit, ...), it was possible to adjust these QMS to a comparable performance in RGA measurements.