Hannover 2020 – wissenschaftliches Programm

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P: Fachverband Plasmaphysik

P 3: Low-temperature plasma and applications 1

P 3.3: Vortrag

Montag, 9. März 2020, 14:45–15:00, b302

The transmission behavior of an energy selective mass spectrometer with a Bessel Box type energy filter — •Christian Schulze¹, Zoltán Donkó², and Jan Benedikt¹ — ¹Institute of Experimental and Applied Physics, Kiel University, Germany — ²Institute for Solid State Physics and Optics, Wigner Research Centre for Physics, Hungary

Ions are responsible for the majority of plasma surface interactions, which are of scientific interest and widely used in commercial applications. Therefore, the accurate measurement of ion energy distributions (IED) for different ion species are essential for their understanding and control. In contrast to other ion diagnostics, energy selective mass spectrometry (ESMS) allows energy and mass selectivity. Unfortunately, ESMS is known to suffer from artifacts like chromatic aberration of ion lenses as well as an energy dependent acceptance angle, both effects distorting the measurement. Therefore, ESMS is typically used for qualitative measurements only. The thorough analysis of chromatic aberration effects on the accuracy of measured IEDs is available only for selected mass spectrometers in the literature. Even less information is available for effects of energy dependent acceptance angles on experimental results, where the angular distribution of sampled ions strongly depends on their energy. Here, results of ion trajectory simulations are presented in order to optimize the settings of the ion lenses and the Bessel Box energy filter. Additionally, measured IEDs will be compared with 1D-PIC simulations, which can provide an estimation of energy-dependent angular distributions of the ion flux.