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Regensburg 2022 – scientific programme

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DS: Fachverband Dünne Schichten

DS 26: Thin Oxides and Oxide Layers 2

DS 26.3: Talk

Thursday, September 8, 2022, 16:45–17:00, H14

The effect of post-growth annealing of titanium dioxide thin films prepared by a sol-gel process on the photocatalytic activity — •Lu He1, Shuo Niu1, Dietrich.R.T. Zahn1,2, and Teresa I. Madeira1,21Technische Universität Chemnitz, Semiconductor Physics, D-09107 Chemnitz, Germany — 2Center for Materials, Architectures and Integration of Nanomembranes (MAIN), Chemnitz University of Technology, 09107 Chemnitz, Germany

TiO2 thin films revealed competitive performance for photocatalytic applications[1,2]. Here, a set of TiO2 thin films are synthesized using a sol-gel process and spin coated on p-type Si(100) substrates with a native oxide layer. The as-deposited thin films are annealed at various temperatures from 400 to 800 °C for 3 hours in ambient conditions.

Characterization is performed using various methods[3] on phases (UV-Raman & X-Ray diffractometry), film thickness and optical constants (Spectroscopic ellipsometry), morphology(Atomic Force Microscopy). Photocatalytic results on photodegradation of acetone to CO2 are obtained in a self-designed gas (reactant)-solid (photocatalyst) reaction chamber. The decrease/increase of acetone/CO2 is monitored via in-situ Fourier Transform Infrared Spectroscopy.

Quantitative data analysis is performed and correlated to indicate the effect of post annealing on the optical and structural properties of the titanium dioxide thin films and their photocatalytic activities.

1. Song,H et al, Conf. Lasers Electro-Optics,CLEO 2019

2. Nalajala et al, C.S.RSC Adv. 9 2019.

3. Gartner,M et al, Sol-Gel Sci. Technol. 2021

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