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Regensburg 2022 – scientific programme

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TT: Fachverband Tiefe Temperaturen

TT 17: Cryogenic Detectors and Cryotechnique

TT 17.6: Talk

Wednesday, September 7, 2022, 11:00–11:15, H22

Opimization of MoSi film deposition for superconducting single-photon detectors in the telecom c-band — •Stefanie Grotowski1, Lucio Zugliani2, Rasmus Flaschmann2, Stefan Strohauer1, Christian Schmid2, Fabian Wietschorke2, Sven Ernst1, Simone Spedicato1, Mirco Metz2, Björn Jonas2, Kai Müller2, and Jonathan Finley11Walter Schottky Institute and Physics Department, Technical University of Munich, Germany — 2Walter Schottky Institute and Department for Electrical and Computer Engineering, Technical University of Munich, Germany

Superconducting single-photon detectors (SSPDs) are a crucial building block for photonic quantum technologies. With regard to the telecommunication infrastructure, SSPDs sensitive in the telecom c-band are required. A promising material in this regard is MoSi, as it unites a small superconducting energy gap enabling high sensitivity while maintaining a high transition temperature. In this work we aim at optimizing the magnetron co-sputtering deposition to achieve high transition temperatures (Tc). We vary the stoichiometry and find maximized Tc values for Mo rich films until an upper limit of around 80% Mo is reached. Above this critical concentation grazing incidence diffration reveals the transition to a polycrystalline phase in the material. Moverover, the working pressure during deposition influences both Tc and structure as well. We find that a low working pressure improves the Tc, but a minimum pressure is required to ensure an amorphous deposition. Finally, with the optimized parameter set we measured a Tc of 8.4 K for 20 nm and 6.2 K for 4.5 nm thin films.

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