Quantum 2025 – scientific programme
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THU: Thursday Contributed Sessions
THU 13: Poster Session: Applications
THU 13.57: Poster
Thursday, September 11, 2025, 16:30–18:30, ZHG Foyer 1. OG
Addressing Fabrication Challenges in Photonic Crystal Cavities for Diamond Color Centers — •Lucca Valerius1,2, Marco E. Stucki1,2, Tommaso Pregnolato1,2, and Tim Schröder1,2 — 1Ferdinand-Braun-Institut (FBH), Gustav-Kirchhoff Str. 4, Berlin, Germany — 2Humboldt-Universität zu Berlin, Newtonstr. 15, Berlin, Germany
Color centers in diamond are a promising platform for quantum communication, providing a spin-photon interface suitable for quantum networks. Embedding these centers in photonic crystal cavities (PhCCs) enhances emission into the zero-phonon line via the Purcell effect, enabling the efficient generation of photon entanglement. However, fabricating diamond-based PhCCs using reactive ion etching remains a major challenge. With feature sizes often below 100 nm, imperfections such as rough sidewalls, micromasking, and etch variability can significantly alter performance and yield. A critical factor is the hard mask material used during oxygen plasma etching, which strongly influences pattern transfer fidelity. In this work, we present an overview of our fabrication approach and development of new methods, including a systematic analysis of common sources of uncertainty and loss in diamond nanofabrication. Our aim is to identify and mitigate key challenges in order to advance reliable, high-performance spin-photon interfaces. By refining fabrication techniques, we contribute to improving the scalability and robustness of diamond-based quantum photonic devices.
Keywords: Diamond; Nanofabrication; Quantum Communication; Spin-photon interface; Reactive Ion Etching