Dresden 2026 – scientific programme
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DS: Fachverband Dünne Schichten
DS 20: Poster
DS 20.16: Poster
Thursday, March 12, 2026, 18:30–20:30, P2
Stress Evolution in Gold Thin Films Under Ion Irradiation — •Jasmin Kahl1, Karla Paz1, Berit Marx-Glowna2, and Carsten Ronning1 — 1Institute of Solid State Physics, Friedrich Schiller University Jena, 07743 Jena, Germany — 2Helmholtz-Institut Jena, Fraunhoferstr. 8, 07743 Jena, Germany
Gold thin films are important for applications requiring mechanical stability and radiation tolerance in optoelectronic devices. This work investigates the stress evolution of polycrystalline Au films irradiated with He, Si, Ag, and Au ions at various energies and fluences. In-situ stress measurements during irradiation show that the as-deposited films are pre-stressed and the mechanical stress increases under irradiation producing a tensile stress. SEM and FIB cross-section images confirm that this stress increase is associated with grain growth, which depends strongly on the ion species. Grain growth increases local density and generates tensile stress because the films are constrained by the substrate. Large grains are advantageous in applications such as electrical interconnects and microstructures, as they reduce electromigration and optical losses. X-ray diffraction reveals structural damage, lattice distortion, and possible crystallite reorientation, while AFM shows increased surface roughness due to sputtering. These results highlight the strong influence of ion species and irradiation conditions on Au thin films, guiding the optimization of gold-based components in demanding environments.
Keywords: gold thin films; ion irradiation; stress evolution; grain growth