Dresden 2026 – scientific programme
Parts | Days | Selection | Search | Updates | Downloads | Help
FM: Fachverband Funktionsmaterialien
FM 11: Poster Session Functional Materials
FM 11.29: Poster
Tuesday, March 10, 2026, 18:00–20:30, P4
Plug-and-play modification of a scanning electron microscope with a secondary electron yield detector — •Kristian Deneke1, Stefanie Haugg1, Isabel González Díaz-Palacio2, Marc Wenskat1,3, Wolfgang Hillert2, Bent Andersen1, Robert Zierold1, and Robert Blick1,3 — 1Center for Hybrid Nanostructures, University of Hamburg, Germany — 2Institute of Experimental Physics, University of Hamburg, Germany — 3Deutsches Elektron-Synchrotron (DESY), Hamburg, Germany
Secondary electrons are already detected and used to achieve image contrast in a scanning electron microscope (SEM). However, measuring the secondary electron yield (SEY) requires a detector configuration that goes beyond the standard features of an SEM. The SEY is an important figure of merit for many different applications and research fields such as electron multipliers, vacuum cavities, and spacecrafts. Therefore, we present a plug-and-play configuration that allows an existing SEM to be modified with an SEY detector. This detector unit enables SEY measurements of conductive and insulating thin films in a pulsed operation mode. Furthermore, planar thin films can be examined not only at normal incidence, but also at an angle of inclination of the primary electrons, allowing for angular-dependent SEY characterization. Finally, the integration of our detector unit within an SEM enables the recording of a 2D SEY map, visualizing structural variations of patterned substrates. This detector setup could increase accessibility of SEY measurements and pave the way to improvements of applications and new measurement techniques.
Keywords: atomic layer deposition; scanning electron microscope; secondary electron yield; 3D printing