Dresden 2026 – scientific programme

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HL: Fachverband Halbleiterphysik

HL 20: Poster I

HL 20.62: Poster

Tuesday, March 10, 2026, 18:00–20:00, P1

Development of open-source DRC scripts for physical verification of integrated circuits with FinFET technology. — •Lev Churkin — Moscow, Russia

The development of open-source DRC scripts for FinFET technologies necessitates a fundamental shift from planar-based verification. It must encapsulate the three-dimensional nature of the transistor, enforcing complex rules for fin formation, cut patterning, and their strict alignment. Furthermore, rules must integrate with multi-patterning lithography, addressing color decomposition and spacing constraints to prevent printability errors. This requires checking more than simple geometrics. Consequently, a modern DRC script is a complex software model, which needs to manage the interdependencies of density, stress engineering, and manufacturing variability at a more advanced level.

Keywords: Open-source; FinFET; DRC; verification; semiconductor