Dresden 2026 – scientific programme
Parts | Days | Selection | Search | Updates | Downloads | Help
HL: Fachverband Halbleiterphysik
HL 38: Materials and Devices for Quantum Technology II
HL 38.11: Talk
Thursday, March 12, 2026, 12:15–12:30, POT/0051
Development of heavy noble gas field ion sources using an iridium coated single crystalline tungsten emitter — •Amina Zid1,2, Gregor Hlawacek1, Nico Klingner1, Arnaud Houel2, and Anne Delobbe2 — 1Institute for Ion Beam Physics and Material Research, Helmholtz-Zentrum Dresden-Rossendorf — 2ORSAY PHYSICS, 95, 3ème Avenue - ZA Saint-Charles, 13710 Fuveau, France
Gas Field Ion Sources (GFIS) provide high brightness, high current density and excellent spatial resolution[1]. Conventional GFIS use light noble gases: helium enables 0.5 nm imaging resolution, while neon allows high-resolution milling beyond Liquid Metal Ion Source (LMIS) capabilities. However, low maximum current limits material removal rates, and the light ions cause deep implantation and bubble formation, reducing efficiency for large-volume or high-aspect-ratio milling. To overcome these limits, we investigate GFIS operation in a Focused Ion Beam (FIB) using heavier noble gases.
Additionally an iridium-coated tungsten tip is investigated. Iridium forms the strongest bond with tungsten[2], enabling higher electric fields and thus higher stable beam currents. Our emitter operates from a single emission point rather than the typical trimer used in Helium Ion Microscopy. This work presents the first FIB performance evaluation of this emitter with argon and xenon, including comparison to helium and neon-based GFIS.
[1] Höflich, K. et al., Applied Physics Reviews 2023; G. Hlawacek & A. Gölzhäuser (Eds.), Helium Ion Microscopy, Springer, 2016.
[2] Oshima, C. et al., Surface Science and Nanotechnology 2018.
Keywords: Microscopy; Gas Field Ion source