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Dresden 2026 – scientific programme

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O: Fachverband Oberflächenphysik

O 19: Vacuum Science & Technology: Theory and Applications – Poster

O 19.2: Poster

Monday, March 9, 2026, 18:00–20:00, P2

Simulation-Guided GIXPS: Planning faster (HA)XPS measurements while enabling depth-sensitivity — •David Capalbo1, Oliver Rehm1, Endrit Kusari1, Andrei Gloskovskii2, Christoph Schlueter2, Lutz Baumgarten3, and Martina Müller11Fachbereich Physik, Universität Konstanz, Konstanz, Germany — 2DESY, Hamburg, Germany — 3FZ Jülich GmbH, PGI-6, Jülich, Germany

(Hard) X-Ray Photoelectron Spectroscopy ((HA)XPS) is an established method for characterizing surfaces, interfaces, and the bulk material properties of thin films, multilayers, and devices. Such measurements, when performed at a synchrotron-based setup, can produce faster and better resolved data compared to a laboratory setup, but beamtime is limited and highly competed for. We present a simulation-based approach that enables faster and more efficient measurements by exploiting grazing-incidence (GI) angle geometries (0.3-2). At these GI angles, tunable depth-selective photoelectron emission becomes possible while increasing the signal by up to two orders of magnitude at characteristic angles. In our approach, an additional damping term is added to an already existing simulation model, which enables the user to simulate an accurate GI(HA)XPS response before the beamtime. This enables them to identify and prioritise configurations of interest, reduce the required aquisition time, all while keeping the expected advantages of standard (HA)XPS measurements. O.Rehm et al.

Keywords: Simulation; GIXPS; Grazing-incidence X-ray photoelectron spectroscopy; XPS; HAXPES

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