Dresden 2026 – scientific programme
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O: Fachverband Oberflächenphysik
O 78: Vacuum Science & Technology: Theory and Applications I
O 78.5: Talk
Thursday, March 12, 2026, 11:45–12:00, HSZ/0401
Traceable outgassing rate measurements of sticky gases — •Matthias Bernien1, Annas bin Ali1, Janez Šetina2, and Karl Jousten1 — 1Physikalisch-Technische Bundesanstalt (PTB), Berlin, Germany — 2Inštitut za kovinske materiale in tehnologije (IMT), Ljubljana, Slovenia
In the semiconductor industry, the outgassing of components in vacuum must be well controlled. These contaminants are monitored using quadrupole mass spectrometry. However, quantitative measurements of the amount of contamination are challenging as quadrupole mass spectrometers (QMSs) inherently lack stability of their sensitivity. To provide comparability and traceability of outgassing rate measurements, processes and transfer standards must be established. PTB together with IMT and industrial partners have developed and characterized outgassing reference samples for dodecane and water. These reference samples consist of a reservoir sealed with an elastomer through which the liquids permeate into vacuum. The reference samples provide well-defined outgassing rates that are used to calibrate QMSs in situ for water and hydrocarbon contaminants. When using sticky gases like water and dodecane, a significant amount of gas molecules adsorbs on the inner surfaces of the vacuum chamber. A numerical model is utilized to simulate the dynamics of the adsorbed phase and the gas phase.
Keywords: metrology; vacuum; outgassing; numerical simulations