Dresden 2026 – scientific programme
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TT: Fachverband Tiefe Temperaturen
TT 28: Superconducting Electronics: SQUIDs and other Josephson Circuits and Components
TT 28.5: Talk
Tuesday, March 10, 2026, 10:30–10:45, CHE/0089
Nanoscale SQUID on a wireframe tip cantilever by corner lithography — •Thijs Roskamp1, Tim Horstink2, Melissa Goodwin1, Erwin Berenschot1, Roeland Huijink2, Edin Sarajilic2, Niels Tas1, and Hans Hilgenkamp1 — 1MESA+ Institute, University of Twente, Enschede, The Netherlands — 2Bruker Nederland B.V., Bruker Corporation, Leiderdorp, The Netherlands
Superconducting quantum interference devices (SQUIDs) are the most sensitive magnetic flux sensors and are used in scanning SQUID microscopy (SSM) to spatially resolve and map magnetism. Conventional SSM probes make use of planar silicon substrates which limit their spatial resolution to several micrometers due to an increased sample-pickup area spacing.
Employing ideas from other scanning probe techniques like atomic force microscopy, moving the SQUID to the apex of tip on a scanning probe can significantly increase the spatial resolution.
We have used the principles of corner lithography and molding in silicon wafers to create freestanding superconducting wireframe tips on cantilevers on the wafer scale. With a focused ion beam we pattern superconducting weak links at the apex of the fabricated wireframe tips to create SQUIDs with sizes from sub-100 nm to several micrometers. By integrating the wireframe probe on a silicon nitride cantilever with pre-defined contact pads, leads, and resistive strain gauges, we create a SQUID on cantilever probe which will enable simultaneous magnetic and topographic imaging.
Keywords: SQUID; Scanning SQUID microscopy; Atomic force microscopy; Cantilever; Nanolithography