Erlangen 2026 – scientific programme
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P: Fachverband Plasmaphysik
P 12: Atmospheric Pressure Plasmas I
P 12.7: Talk
Wednesday, March 18, 2026, 15:30–15:45, KH 01.020
Silicon Nitride Membrane for Vacuum Ultraviolet (VUV) Spectroscopy of Commonly Used Plasma Jets — •Görkem Bilgin1, Jan Benedikt1,2, and Luka Hansen1, 2 — 1Institute of Experimental and Applied Physics, Kiel University, Kiel, Germany — 2Kiel Nano, Surface and Interface Science KiNSIS, Kiel University, Kiel, Germany
The diagnostic of VUV photons generated by non-thermal atmospheric pressure plasmas is complicated by the strong absorption in air and common window materials (e.g., LiF, MgF2) as these materials have cutoff wavelengths of around 110 nm [1, 2]. Various windowless techniques have been developed in the past to transfer the VUV photons into a vacuum, but each method has its drawbacks [2].
For this contribution, an evacuated monochromator, equipped with an ultra-thin (20 nm) silicon nitride (Si3N4) membrane as an entrance window for the VUV radiation, was upgraded compared to [2] using narrower entrance/exit slits and a new detector, in order to improve the spectral resolution and achieve higher intensities.
VUV spectra of the COST Jet [3], Capillary Jet [4], and kINPen [5] will be presented, and the VUV emission correlated with UV/VIS spectra and electrical measurements.
[1] J. Golda et al. 2020 Plasma Process. Polym. 17 1900216
[2] L. Hansen et al. 2025 Plasma Sources Sci. Technol. 34 12LT01
[3] J. Golda et al. 2016 J. Phys. D: Appl. Phys. 49 084003
[4] T. Winzer et al. 2022 J. Appl. Phys. 18 183301
[5] S. Reuter et al. 2018 J. Phys. D: Appl. Phys. 51 233001
Keywords: Vacuum Ultraviolet; Spectroscopy; Atmospheric Pressure Plasma; Capillary Jet; Microplasma