Erlangen 2026 – scientific programme
Parts | Days | Selection | Search | Updates | Downloads | Help
P: Fachverband Plasmaphysik
P 23: Low Pressure Plasmas IV
P 23.1: Talk
Friday, March 20, 2026, 11:00–11:15, KH 01.012
Double probe calibration in different plasma regimes using microwave cavity resonance spectroscopy — •Andreas Petersen1, Johanna Vogt2, Jens Oberrath2, Julian Held3, and Franko Greiner1,4 — 1Institute of Experimental and Applied Physics, Kiel University, Kiel, Germany — 2South Westphalia University of Applied Sciences, Soest, Germany — 3Eindhoven University of Technology, Eindhoven, Netherlands — 4KiNSIS, Kiel, Germany
Probe-based diagnostics remain a cornerstone of plasma characterization, offering spatially resolved measurements through precise positioning of the exposed probe tip. But factors like RF compensation and surface contamination can complicate matters. Also, the correct ion current model must be selected: while the ABR theory assumes collisionless, non-orbiting ions, the BRL framework incorporates ion orbiting and weak collisionality. For strongly collisional regimes the modified Talbot-Chou model is an option. This makes model selection nontrivial. We present a comparative study of simultaneous double-probe and microwave cavity resonance spectroscopy (MCRS) measurements, because MCRS is very sensitive and can detect changes in electron density of the order of 1010m−3. These results pave the way for future applications in nanodusty and electronegative plasma systems.
We gratefully acknowledge funding by Deutsche Forschungsgemeinschaft (DFG), Project No. 531667910
Keywords: Langmuir probe; Microwave cavity resonance spectroscopy (MCRS); electron density; ion current regime