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P: Fachverband Plasmaphysik
P 5: Low Pressure Plasmas I
P 5.3: Talk
Tuesday, March 17, 2026, 11:45–12:00, KH 02.016
Calorimetric and electrostatic probe diagnostics of a gas aggregation source plasma — •Caroline Adam1, Viktor Schneider1, Jessica Niemann1, Daniil Nikitin2, Jan Hanuš2, Ronaldo Katuta2, Iqra Wahid2, Veronika Červenková2, Andrey Shukurov2, Hynek Biederman2, and Holger Kersten1,3 — 1Institute of Experimental and Applied Physics, Kiel University, Kiel, Germany — 2Faculty of Mathematics and Physics, Department of Macromolecular Physics, Charles University, Prague, Czech Republic — 3Kiel Nano, Surface and Interface Science KiNSIS, Kiel University, Kiel, Germany
Gas aggregation cluster sources (GAS) have been emerging as a key technology for the production of clusters and nanoparticles (NPs) of precise size and composition. The resulting NP properties are significantly affected by the thermal balance during their growth in the aggregation zone. In this study, the characteristics of a novel controllable GAS setup are investigated, using a post (cylindrical) magnetron with a rotating magnetic circuit [1] equipped with a copper target in Ar and/or N2 atmosphere, respectively. Energy fluxes are quantified by calorimetric measurements using passive thermal probes (PTP), while the plasma parameters are assessed by Langmuir probes. These quantities are critical to develop a comprehensive understanding of the correlation between (external) process parameters (e.g., current, voltage, continuous or pulsing, gas pressure) and (internal) plasma parameters and their correlation with NP growth, transport and microstructure. [1] D. Nikitin et al., Plasma Processes Polym. 18 (2021).
Keywords: magnetron sputtering; nanoparticles; gas aggregation source; Langmuir probe; energy flux