Erlangen 2026 – scientific programme

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P: Fachverband Plasmaphysik

P 8: Low Pressure Plasmas II

P 8.1: Invited Talk

Tuesday, March 17, 2026, 16:15–16:45, KH 01.020

Near-plasma Chemical Surface Engineering — •Paula Navascués and Dirk Hegemann — Empa, St. Gallen, Switzerland

The possibility of avoiding ion bombardment during plasma surface engineering, while simultaneously benefiting from the contribution of reactive plasma species, is a targeted objective for materials processing. In this context, we have recently developed a new experimental strategy called near-plasma chemical (NPC) surface engineering. By introducing a polymeric mesh between the substrate and the plasma, close to the plasma-sheath boundary, charged particles are attracted to the mesh. As a result, unlike direct plasma exposure, high-energy deposition at the sample surface can be mitigated without modifying the plasma properties. The beneficial impacts of NPC have been demonstrated for plasma activation of polymers to enhance wettability and durability, as well as for the deposition of thin films via plasma polymerization. Furthermore, NPC can prevent dust deposition onto the samples, even in highly dusty plasmas, resulting in smooth surfaces at the nanoscale. In this talk, the main aspects explored by our group and our collaborators for Near-plasma Chemical Surface Engineering will be presented, as well as different applications of surface modification and thin film deposition using this approach.

Keywords: plasma polymerization; ion bombardment; nanoporosity; low-pressure plasma; surfaces