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Q: Fachverband Quantenoptik und Photonik

Q 10: Quantum Technologies – Photon Detectors and Sources

Q 10.4: Talk

Monday, March 2, 2026, 17:45–18:00, P 5

Deterministic single ion implantation of Er into thin film lithium niobate — •Maranatha Andalis, Reiner Schneider, and Klaus D. Jöns — Institute for Photonic Quantum Systems (PhoQS), Center for Optoelectronics and Photonics Paderborn (CeOPP) and Department of Physics, Paderborn University, 33098 Paderborn, Germany

Incorporating rare-earth ions (REIs) into lithium niobate-on-insulator (LNOI) is of great interest for scalable photonic integrated circuits (PICs), as it enhances the functionality of LNOI with the unique properties offered by REIs. Erbium ions can be introduced into LNOI through ion implantation, enabling device operation at telecom wavelengths. In our setup, the ion implanter achieves an 85% implantation efficiency using secondary electron emission detection for single ion Er implantation into LNOI. The results presented here provide an overview of the most recent advancements in this topic.

Keywords: tfln; single ion implantation; deterministic implantation