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Q: Fachverband Quantenoptik und Photonik
Q 40: Poster – Photonics
Q 40.10: Poster
Wednesday, March 4, 2026, 17:00–19:00, Philo 1. OG
Fabrication of High Quality Factor Resonators in Ta2O5 for Integrated Nonlinear Photonics — •Jan Wulkotte1,2,3, David Lemli1,2,3, Tim Buskasper1,2,3, and Carsten Schuck1,2,3 — 1Department for Quantum Technology, University of Münster, Heisenbergstr. 11, 48149 Münster, Germany — 2Center for Soft Nanoscience, Busso-Peus-Str. 10, 48149 Münster, Germany — 3Center for Nanotechnology, Heisenbergstr. 11, 48149 Münster, Germany
Integrated nonlinear photonics enables the generation of quantum light through sub-wavelength waveguide confinement and high-quality-factor resonators to enhance nonlinear light-matter interactions. Within this framework, tantalum pentoxide (Ta2O5) has emerged as a compelling material platform owing to its high refractive index, low propagation loss, and strong third-order optical nonlinearity.
Efficient nonlinear processes require precise dispersion engineering, which necessitates the use of thick films and introduces substantial nanofabrication challenges. In this work, we demonstrate microring resonators with high quality factors at 1550 nm based on 600 nm-thick Ta2O5 films on SiO2 substrates with air cladding. In addition, we show an efficient coupling scheme based on polymer-printed couplers with minimal simulated back reflection, which is expected to facilitate precise control of Kerr nonlinear dynamics.
These high-quality-factor Ta2O5 microring resonators constitute a key building block for integrated nonlinear and quantum photonic circuits, paving the way toward on-chip Kerr nonlinear processes and the generation of non-classical states of light.
Keywords: Nonlinear nanophotonics