Regensburg 2013 – wissenschaftliches Programm
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HL: Fachverband Halbleiterphysik
HL 70: Poster Session: Devices; Preparation and characterization; C/diamond; Si/Ge
HL 70.10: Poster
Mittwoch, 13. März 2013, 16:00–20:00, Poster A
strain and temperature evaluation of electro-thermal actuators using raman spectroscopy — •pramodh srinivasa1, evgeniya sheremet1, raul rodriguez1, alexey shaporin2, ovidiu gordan1, gianina schondelmaier3, and dietrich zahn1 — 1Semiconductor Physics, Chemnitz University of Technology, Chemnitz, Germany — 2Microsystems and Precision Engineering, Chemnitz University of Technology, Chemnitz, Germany — 3Materials and Reliability of Micro-Technical Systems, Chemnitz University of Technology,Chemnitz, Germany
Strain and temperature changes in Micro-Electro-Mechanical Systems devices are key factors to determine the performance and reliability. Movable parts are the main components of MEMS actuators responsible for sensing and actuating. Upon applying a potential to the actuator,resulting current flow heats up the comb structures leading to strain and temperature effects in turn making them move and elongate. Optical techniques are adopted for quantifying strain and temperature in comparison to other techniques, as they are highly accurate, non-destructive, and non-invasive. Micro-Raman Spectroscopy is used in this work to estimate the temperature and localized strain based on the analysis of the shift in the position of the optical phonon. The excitation wavelength used is 632nm(HeNe laser)with a spectral resolution of 0.23cm-1. We report the characterization of electro-thermal actuators in idle and working conditions under different external temperature and potentials.Spatially resolved temperature and stress maps of different components of the device are discussed.