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P: Plasmaphysik

P 10: Entladungen II

P 10.1: Vortrag

Dienstag, 10. März 1998, 09:30–09:45, H13

High Pressure, Direct Current Microhollow Electrode Discharges — •Robert Stark — Physical Electronics Research Institute, Old Dominion University, Norfolk, VA 23529, USA

By reducing the size of the cathode opening to the order of hundreds of micrometer we were able to operate hollow cathode discharges in a direct current mode at pressures up to 1 bar and above. The electron energy distribution of these discharges is strongly nonthermal. Spectral measurements in the VUV have shown that the microdischarges are strong sources of excimer radiation in argon and xenon. Besides being used as a excimer lamp, the nonequilibrium microhollow cathode discharge (MHCD) offers applications in flat panel displays, plasma reactors and plasma cathodes.

This work is supported by the Department of Energy and by the Air Force Office for Scientific Research.