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P: Plasmaphysik
P 20: Diagnostik (Poster)
P 20.3: Poster
Montag, 15. März 1999, 16:30–19:00, PY
”IRMA“ a Tunable Infrared Multi-Component Acquisition System for Plasma Diagnostics — •J. R"opcke1, M. K"aning1, J. Anders2, F. G. Wienhold2, D. D. Nelson3, and M. S. Zahniser3 — 1Institut f"ur Niedertemperatur-Plasmaphysik, 17489 Greifswald, R.-Blum-Str. 8-10, Germany — 2Fraunhofer Institut f"ur Physikalische Me"stechnik, 79110 Freiburg i. Br., Heidenhofstr. 8, Germany — 3Aerodyne Research, Inc., 45 Manning Rd, Billerica MA 01821-3976, USA
The monitoring of transient or stable plasma reaction products, in particular the measurement of their ground state concentrations, is the key to an improved understanding of plasma chemistry and kinetics in molecular non-equilibrium plasmas, which are of increasing interest for plasma processing. Infrared tunable diode laser absorption spectroscopy (TDLAS) is a modern promising technique with specific capabilities for effective and reliable on-line process control in research and industry. For plasma di agnostics and control a compact and transportable tunable infrared multi-component acquisition system, ”IRMA“ , has been developed. The IRMA system contains 4 independent laser stations which can be temporally multiplexed. A multi-path cell is included for exhaust gas detection. Based on rapid scan software using direct absorption with sweep integration, the absolute concentrations of several molecular species can be measured simultaneously within milliseconds and used as digital output for process cont rol. A survey of characteristic measurements demonstrates the flexibility and versatility of ”IRMA“.