Münster 1999 – wissenschaftliches Programm
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O: Oberflächenphysik
O 36: Poster (II)
O 36.84: Poster
Donnerstag, 25. März 1999, 20:00–22:30, Zelt
Recipes for the Calibration of Piezos with a cheap and easy-to-use Fiber Optical Displacement Sensor — •Markus Heyde1, Heinz Sturm2, and Klaus Rademann1 — 1Humboldt-University, Institute of Physical Chemistry, Bunsenstr. 1, 10117 Berlin — 2Federal Institute of Materials Research, Lab. VI.32, 12200 Berlin
Scanners for Scanning Probe Microscopes (SPM) are generally built of piezos, which are used to move the sample with respect to the tip in x-, y- or z-direction or vice versa.
These piezoelectric scanners are usually calibrated by the manufacturer with laser interferometry, with a calibration grid or with the crystallographic or artificial step of a known height standard.
However, the displacement depends on the voltage history of the piezoelectric device.
In order to avoid this effect for the x- and y-position, SPM data is generally collected in one lateral direction to minimize the divergence between commanded position and true position.
The aim of this work shall be to present the usefulness of a cheap and easy-to-use fiber optic displacement sensor.
The sensor can be used to measure static and dynamic displacement of a z-piezo in order to find a calibration procedure or at least an error look-up table for open-loop systems.
The collected data of two different piezo scanner types can be used to characterize their non-linearity and hysteresis.