Regensburg 2000 – wissenschaftliches Programm

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HL: Halbleiterphysik

HL 8: Photonik

HL 8.3: Vortrag

Montag, 27. März 2000, 17:00–17:15, H17

Ultrashort Edge Emitting Microlasers Based on 1D Photonic Bandgap Mirrors — •Kamran Avary, Frank Klopf, Siegfried Rennon, Johann-Peter Reithmaier, and Alfred Forchel — Technische Physik, Universität Würzburg, Am Hubland, 97074 Würzburg

A new type of ultrashort edge emitting microlaser based on photonic bandgap mirrors was developed which will allow large scale monolithical integration of optoelectronic devices. The devices were realized by fabricating GaInAs/AlGaAs ridge waveguide lasers with deeply etched gratings on both cavity ends. The 1D photonic bandgap gratings were defined by high resolution electron lithography and etched through the whole vertical waveguide (greater than 3 µ m ) by an optimized Cl₂/Ar ECR-RIE process. Room temperature operation was achieved for devices with cavity lengths down to 40 µ m (CW) and 20 µ m (Pulsed), respectively. First high frequency measurements were performed and a maximum 3dB modulation frequency of more than 12 GHz was determined for a 40 µ m long device.