Berlin 2001 – scientific programme

Parts | Days | Selection | Search | Downloads | Help

P: Plasmaphysik

P 11: Dusty Plasmas and Low Temperature Discharges (Poster Session)

P 11.2: Poster

Thursday, April 5, 2001, 12:30–15:00, AT2

Optical diagnostic methods applied to a thermal RF plasma process — •Holger Schubert, Toma Toncian, Jürgen Uhlenbusch, and Matthias Weiß — Institut f. Laser- u. Plasmaphysik, Universitätsstr.1, 40225 Düsseldorf

Zirconia (ZrO₂) is a high melting material which can be used in the field of thermal insulation and solid oxide fuel cells. RF Plasmas with high densities and gas temperatures at pressures near one atmosphere are suitable for the production of ZrO₂ nanopowders and -coatings at high rates. Solid or liquid substances are evaporated after injection into the plasma and the vapor condenses behind the plasma to nanosized particles and/or coatings. The evaporation of the precursor material was examined by means of two methods: Imaging spectroscopy (50 positions in the plasma are measured simultaneously) and monochromatic imaging (an intensified CCD camera system in connection with interference filters records images with high temporal and spatial resolution). Employing these diagnostics, the influence of different methods of particle injection on the evaporation and its dependence on plasma parameters (temperature distribution, flow field, gas flows, pressure, plate power etc.) is studied and compared with model calculations.