Berlin 2001 – scientific programme
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P: Plasmaphysik
P 11: Dusty Plasmas and Low Temperature Discharges (Poster Session)
P 11.22: Poster
Thursday, April 5, 2001, 12:30–15:00, AT2
Generation of a DC glow discharge at high pressure and gas flow with Micro Structure Electrodes: Characteristic properties of a versatile plasma source — •O. Hohn1, A. Bräuning-Demian2, T. Jahnke1, C. Penache1, S. Schößler1, L. Spielberger1, and H. Schmidt-Böcking1 — 1Institut für Kernphysik, J.W. Goethe Universität Frankfurt — 2Gesellschaft für Schwerionenforschung, Darmstadt
Micro Structure Electrodes (MSE) represent a new type of plasma
source that produces a stable, non-thermal discharge in a wide
range of pressure. MSE allow the generation of DC discharges with
different gases at moderate working voltages. The special foramen
geometry of the MSE, in connection with the possibility of
varying the gas flow through the pores, opens a large spectrum of
possible applications. The species produced in the discharge
(excited atoms, ions, etc.) are extracted as a beam by the gas
flow through the pore. The discharge can be affected specifically
by changing different parameters (gas composition, energy
density, gas flow, pressure gradient etc).
The characteristic electrical features of the plasma produced with this
compact
source are shown for helium as a function of pressure and power
at a variable gas flow. These results are completed by
measurements characterising the extracted beams regarding their
composition and properties.
Supported by: Deutsche Bundesstiftung Umwelt and BMBF