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DPG

Berlin 2001 – wissenschaftliches Programm

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P: Plasmaphysik

P 11: Dusty Plasmas and Low Temperature Discharges (Poster Session)

P 11.22: Poster

Donnerstag, 5. April 2001, 12:30–15:00, AT2

Generation of a DC glow discharge at high pressure and gas flow with Micro Structure Electrodes: Characteristic properties of a versatile plasma source — •O. Hohn1, A. Bräuning-Demian2, T. Jahnke1, C. Penache1, S. Schößler1, L. Spielberger1, and H. Schmidt-Böcking11Institut für Kernphysik, J.W. Goethe Universität Frankfurt — 2Gesellschaft für Schwerionenforschung, Darmstadt

Micro Structure Electrodes (MSE) represent a new type of plasma source that produces a stable, non-thermal discharge in a wide range of pressure. MSE allow the generation of DC discharges with different gases at moderate working voltages. The special foramen geometry of the MSE, in connection with the possibility of varying the gas flow through the pores, opens a large spectrum of possible applications. The species produced in the discharge (excited atoms, ions, etc.) are extracted as a beam by the gas flow through the pore. The discharge can be affected specifically by changing different parameters (gas composition, energy density, gas flow, pressure gradient etc).
The characteristic electrical features of the plasma produced with this compact source are shown for helium as a function of pressure and power at a variable gas flow. These results are completed by measurements characterising the extracted beams regarding their composition and properties.
Supported by: Deutsche Bundesstiftung Umwelt and BMBF

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