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P: Plasmaphysik
P 12: Plasma Wall Interaction, Diagnostic and Low Temperature Discharges (Poster Session)
P 12.15: Poster
Freitag, 6. April 2001, 12:30–15:00, AT2
Time Correlated Measurements of Spectra from Process and Beam Plasmas in the Range from 240 nm to 1000 nm — •A. Tawfik, S. Quell, K. Hirsch, B. Roth, J. Schneider, and U. Schumacher — Institut für Plasmaforschung, Pfaffenwaldring 31, 70569 Stuttgart
Spectroscopy of plasmas with time and spatial variation needs simultaneous recording of time and space correlated spectra with high spectral resolution. Usually applied spectrometer systems are limited either in bandwidth or in resolution, both necessary for survey spectroscopy. We present two different systems (Echelle spectrometer and multiple CCD line spectrometer) for wide spectral range recording with high resolution. The Mechelle spectrometer is equipped with two crossed gratings of different dispersion and operates in 100th order at 200 nm and in 20th order at 1000 nm, resulting in constant spectral resolution λ/Δλ=nN=8000 over the whole spectral range. The multiple CCD line spectrometer is made up of a concave grating with 1600 groves/mm and several CCD lines on the Rowland circle.
Simultaneously recorded high resolution spectra of SiI, Cl, CH, NI, OI and CaI ranging from the UV to the near IR spectral region demonstrate the properties of the spectrometers. The erosion rates can be determined from these correlated measurements, and parameters for deposition applications can be set reproducibly.