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P: Plasmaphysik
P 12: Plasma Wall Interaction, Diagnostic and Low Temperature Discharges (Poster Session)
P 12.3: Poster
Friday, April 6, 2001, 12:30–15:00, AT2
Determination of atomic hydrogen fluxes and reflection coefficients in ICP-discharges — •S. Meir1,2, U. Fantz1, and K. Behringer1,2 — 1Lehrstuhl für Experimentelle Plasmaphysik, Institut für Physik, Universität Augsburg, 86135 Augsburg — 2Max-Planck-Institut für Plasmaphysik, 85748 Garching, EURATOM Assoziation
Atomic hydrogen fluxes have been determined by using emission spectroscopy in a planar inductively coupled plasma (ICP) in hydrogen and deuterium. The atomic density was obtained from the radiation of the Balmer lines, considering the opacity of the Lyman series in a collisional-radiative model. Introducing an additional surface into the plasma spatial resolved measurements yield the fluxes. Depending on pressure (p= 2-100 Pa) the particle flow changes from molecular to diffusive flow, which shows the applicability of the method. The reflection coefficient for the material (Fe, Al, Cu, Steel or Carbon) is then given by the comparison of the fluxes with and without surface. The results show a clear dependence on material and in addition an isotope effect. Furthermore, the influence of these materials on the rotational temperature and the vibrational population of the molecules have been investigated.