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P: Plasmaphysik

P 7: Dusty Plasmas, Diagnostics III

P 7.2: Vortrag

Donnerstag, 5. April 2001, 16:45–17:00, 2032

Measurement of ZrO₂ Particle Velocities in an RF-Plasma — •Matthias Weiß, Holger Schubert, Toma Toncian und Jürgen Uhlenbusch — Institut für Laser- und Plasmaphysik, Heinrich- Heine- Universität Düsseldorf

An inductively coupled plasma is used for the synthesis of nano-powders. The major concern in this process lies in the complete evaporation of high-melting precursors, such as Zirconia (ZrO₂), which are injected into the plasma. The grade of evaporation can be increased by decreasing the residence times of the particles in the plasma. This can be achieved by increasing the process pressure and/or decreasing the carrier gas flow, as also shown by model calculations. The influence of the process parameters on the evaporation process is discussed in this paper.ZrO₂ powders are injected into a thermal RF-plasma and Laser Doppler Anemometry (LDA) is performed to measure particle velocities and trajectories. As further method, traces of particles, which are illuminated by laser light, are detected by a CCD camera. All measurements are performed at different positions in the plasma while varying the plasma parameters and geometry. The results of the measurements are compared with model calculations.