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P: Plasmaphysik
P 9: Dense Plasmas and Plasma Diagnostic (Poster Session)
P 9.19: Poster
Tuesday, April 3, 2001, 12:30–15:00, AT2
Investigation of reactive plasmas in an inductively coupled GEC reference cell by absorption spectroscopy — •I. Möller, Y. Ivanov, and H. Soltwisch — Institut für Experimentalphysik V, Ruhr-Universität Bochum, Germany
Hydrocarbon plasmas with admixtures of oxygen are widely used in
technical applications although the understanding of the complex
kinetics is far from being complete. Densities and
temperatures (Ttrans und Trovib) of
molecular species can be derived directly by absorption
spectroscopy. The required sub-Doppler resolution is ensured by
the usage of tunable diode lasers.
Measurements in an
inductively coupled GEC reference cell with methane and oxygen as
feed gases are presented. The dependency of molecular densities
on
external parameters as the applied power, the flow rate and the
gas composition is shown in comparison to results from a
capacitively coupled plasma where the behaviour of the source
gases and an intermediate species (CH3) is explainable
by simple rate equations.