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DS: Dünne Schichten
DS 31: Postersitzung
DS 31.18: Poster
Tuesday, March 27, 2001, 16:30–17:30, Foyer Saal 4
EXAMPLES OF COMBINED ION BEAM ANALYSIS — •E. Wendler1, C. Jeynes2, and N. P. Barradas3 — 1Friedrich-Schiller-Universität Jena, Institut für Festkörperphysik — 2University of Surrey (Guildford), Ion Beam Centre — 3Universidade de Lisboa, Centro de Fisica Nuclear
Ion beam analysis (IBA) methods like Rutherford backscattering (RBS), Nuclear reaction analysis (NRA) and Elastic recoil detection (ERD) are well established tools in the field of thin film analysis. The availability of high ion energies of a few MeV and modern computing techniques increased the field of applications in the last years. Especially the combination of RBS, NRA and ERD often allows a full determination of the composition of the layer structure under investigation. The programme WiNDF [1] automatically and simultaneously fits several spectra obtained by the IBA methods mentioned above and thus increases significantly quality, speed and flexibility of data evaluation and handling. In the present paper different examples are given, which show the capability of IBA in conjunction with the WiNDF programme. The examples comprise the analysis of hardening layers on steel, layers for magnetic-storrage elements, polymers and high-precision dose measurements of heavy elements in silicon.
[1] N.P. Barradas, C. Jeynes, R.P. Webb, Appl. Phys. Lett. 71 (1997) 291.