Hamburg 2001 – wissenschaftliches Programm
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HL: Halbleiterphysik
HL 11: Kohlenstoff / Diamant
HL 11.11: Vortrag
Montag, 26. März 2001, 18:00–18:15, S17
Analysis of steel-diamond surfaces after high temperature thermochemical polishing — •James Andrew Weima1, Johannese von Borany2, and Wolfgang R. Fahrner1 — 1Department of Electronic Devices, University of Hagen, Haldener Str. 182, 58084 Hagen, Germany — 2Institute of Ion Beam Physics and Material Research, P. O. Box 510119, 01314 Dresden, Germany
Polycrystalline CVD diamond films were polished on cylindrical steel plates at elevated temperatures in an argon-hydrogen atmosphere. The diamond and steel surfaces were characterized using the Raman spectroscopy. Raman bands of graphite and complexes relating to carbon-hydrogen, hydrogen and nitrogen were found on both surfaces at identical wave numbers. SEM-EDX spectra of steel samples manifested inhomogeneity in the surface distribution of carbon before and after polishing. ERDA depth profiling of steel samples also showed inhomogeneity in the distribution of carbon especially within the first 50 nm. RBS analysis of as-polished diamond surfaces revealed a band of iron particles with depth ranging between 40-120 nm depending on the polishing time. This band vanished after etching the films in chromic acid for a period of 2 hours. The depth of the band was assumed closely related to the thickness of the graphite layer which also vanished with etching.