Regensburg 2002 – wissenschaftliches Programm
DF 7.6: Vortrag
Donnerstag, 14. März 2002, 11:30–11:50, 11
Pyroelectric detector arrays for presence detection based on sputtered PZT thin films — •Matthias Schreiter1, Rainer Bruchhaus1, Reinhard Gabl1, Dana Pitzer1, Robert Primig1, Wolfram Wersing1, Bernhard Winkler2, Norbert Hess3, and Reinhard Koehler3,4 — 1Siemens AG, Corporate Technology, D-81730 Munich — 2Infineon Technologies, D-81730 Munich — 3DIAS GmbH, D-01069 Dresden — 4TU Dresden, IFE, D-01062 Dresden
Pyroelectric infrared (IR) low cost detector arrays are required for thermal detection of objects and persons in a wide range of applications, e.g. for presence detection in intelligent building systems, traffic management etc. The application of ferroelectric thin films instead of bulk materials in combination with bulk or surface micromachining necessary for thermal isolation determines a new generation of pyroelectric detector arrays. These arrays are well suited for presence detectors showing a high performance at low production costs.
While best thermal isolation properties are achieved for bulk micromachining, our innovative concept of surface micromachining offers the opportunity to integrate the readout circuitry and to produce arrays with large pixel numbers, high reliability and yield.
In this talk the technology to produce pyroelectric detector arrays based on surface micromachining is presented. The used ferroelectric PZT thin films are deposited by multi target sputtering. These films exhibit high pyroelectric coefficients and very low dielectric losses resulting in a high figure of merit (FOM) for pyroelectric sensor applications.