Regensburg 2002 – wissenschaftliches Programm

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DS: Dünne Schichten

DS 22: Multilayer II

DS 22.3: Vortrag

Donnerstag, 14. März 2002, 15:30–15:45, HS 31

Soft X-ray scattering of metal-ceramic multilayers — •Alexei Nefedov1, Hartmut Zabel1, and Franz Schäfers21Institut fr Experimentalphysik/Festkörperphysik, Ruhr-Universität Bochum, 44780 Bochum — 2BESSY GmbH, Albert-Einstein-Strasse 15, 12489 Berlin

Imaging with soft x-rays is a very important part of present day thin film technology. For the water window (280 eV - 530 eV) highly reflecting ML mirrors are rare. In a present contribution we report on a novel type of multilayer mirrors for the soft x-ray regime, namely Me/Al2O3 (Me=V, Ti) layered stacks with periods Λ from 1.24 to 7.6 nm and number of double layers from 30 to 75 grown by RF sputtering techniques. The period of some multilayers was fitted in order to have a Bragg peak near 45o(Brewster’s angle) or 90o (normal incidence). Experimental reflectivities obtained with soft x-ray synchrotron radiation from BESSY are presented. We have performed θ−2θ scans in the region of Bragg reflection at different photon energies as well as energy scans at fixed angles of incidence with special emphasis on the investigation of the L3 absorption edges. Maximal values of normal incidence reflectance of 0.1% and a reflectance near Brewster’s angle of 3.3% an energy close to the L3 edge of Ti. We acknowledge funding by DFG (Za 161/14-3).

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