Regensburg 2002 – wissenschaftliches Programm

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SYME: Mechanical Properties of Thin Films

SYME 3: Mechanical Stresses and Plasticity

SYME 3.1: Vortrag

Dienstag, 12. März 2002, 11:30–11:45, H 4

Acoustomigration in Thin Metal Films — •Anton Leidl, Franz Kubat, and Werner Ruile — EPCOS AG, Surface Acoustic Wave Components, Postfach 80 17 09, 81617 München, Anzinger Str. 13

In modern mobile communication systems surface acoustic wave (SAW-) devices are used as high frequency front-end filters. For these high power applications the metal of the thin electrodes may be prone to mechanical stress induced migration (acoustomigration) and thus deteriorate the filter performance or even damage the filter.

Many different metalization schemes have been investigated so far. They are usually developed due to a phenomenological understanding of the failure mechanism. But because of different test devices, test conditions and failure criteria it is difficult to compare and discuss the experimental results of different research groups.

In the present work we propose a SAW test device and on-wafer measurement system to investigate different metalization schemes. We are also able to calculate the distribution of stress- and strain and the energy density in the metal film of the test device at frequencies up to 2 GHz. Hence we can compare different metalizations with respect to acoustomigration in a well defined manner experimentally as well as theoretically.