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P: Plasmaphysik

P 10: Poster II

P 10.3: Poster

Tuesday, March 18, 2003, 17:30–19:15, Foyer

Two-dimensional fluid simulation of inductively coupled argon discharges — •Yuri Ivanov, Yuri Ivanov, S.Vikram Singh, Carsten Pargmann, Henning Soltwisch, S.Vikram Singh, Carsten Pargmann, and Henning Soltwisch — Institute for Experimental Physics V, Ruhr-University Bochum, 44780 Bochum, Germany

Two dimensional (r-z) fluid simulation is used to describe the electron density spatial distribution and the spatial variation of the electron energy distribution functions in a standard GEC - reference cell at steady state. The simulation models an argon plasma with momentum transfer, excitation, and ionization. The electrons and ions are treated as fluid species [1]. The spatial profiles of them are defined from the continuity equations. The electron distribution functions are obtained from the solution of Bolzmann equation in a conventional two-term approximation. The solution of Maxwell’s equations describes rf-field spatial distribution. The system of two equations for real and imaginary components is solved by over-relaxation method.

The loop for iterative calculation of plasma parameters is repeated until the deviations between two consecutive cycle parameters (power and electric field in the center of plasma) are less than 5 percentage which is normally achieved after 5-6 iterations.

The simulated electron density and distribution function profiles are compared with Langmuir probe measurements performed under bright discharge mode (ICP - H-mode) with a movable probe head at pressure range from 0.4 Pa to 15 Pa.

1. D.P. Lymberopoulis, D.J. Economou 1993 Appl. Phys. Lett. 63 2478;