Aachen PK 2003 – wissenschaftliches Programm
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P: Plasmaphysik
P 10: Poster II
P 10.7: Poster
Dienstag, 18. März 2003, 17:30–19:15, Foyer
Diagnostics of stable and transient species in pulsed and cw rf discharges in CF4 — •Martin Geigl and Jürgen Meichsner — Institut für Physik, Ernst-Moritz-Arndt-Universität Greifswald, Domstr. 10a, D-17489 Greifswald
Transient and stable species, produced from CF4 in a capacitively coupled rf discharge (13.56 MHz) have been investigated. Appearance Potential Mass Spectrometry (APMS) as well as Electron Attachment Mass Spectrometry (EAMS) has been used to trace the time dependence of the CFx-radical density (x = 1-3) and higher order stable products (CxFy, x ≤ 5). In a closed reactor initially the feed gas fragments into CFx-radicals. Then long-chain molecules are formed successively from these fragments. The feed gas is thereby continuously consumed. In a pulsed plasma the formation of several species during the plasma-on phase and their decomposition in the afterglow has been examined.