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Aachen PK 2003 – wissenschaftliches Programm

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P: Plasmaphysik

P 3: Low Temperature Plasmas, Plasma Technology

P 3.1: Vortrag

Montag, 17. März 2003, 15:45–16:05, FO4

Charge transfer measurement of micro discharges in single-gap and cascaded discharge setups — •Thomas Lierfeld1, Oliver Franken1, Michael Heise2, and Willi Neff21Lehrstuhl f"ur Lasertechnik, RWTH Aachen, Aachen, Germany — 2Fraunhofer Institut Lasertechnik, Aachen, Germany

Dielectric barrier discharges (DBD) at atmospheric pressure usually form separated micro discharges. The homogeneity, i.e. the spatial and temporal distribution of these micro discharges, plays a role for treatment of flat surfaces where uniform surface covering is required. The homogeneity can be controled by varying the power input into the plasma, but also the charge transfer per micro discharge is of great importance. The value of the charge transfer is not only affected by the discharge gas itself but also by the dielectrics used in the setup. By investigation of the charge transfer in a single-gap setup and a new cascaded setup we show that the use of an additional UV-transparent dielectric results in a reduced charge transfer per micro discharge. By this means the homogeneity of the discharge is improved compared to the single-gap setup.

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