Aachen PK 2003 – wissenschaftliches Programm

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P: Plasmaphysik

P 4: Poster I

P 4.50: Poster

Montag, 17. März 2003, 17:45–19:15, Foyer

Infrared Diode Laser Diagnostics of fluorocarbon molecular species in pulsed RF Discharge — •Konstantin Li, Onno Gabriel, and Jürgen Meichsner — Institute of Physics, University of Greifswald, Domstr. 10a, D-17487 Greifswald

The study is devoted to the diagnostics of transient (CF_x-radicals, x=1-3) and stable species in fluorocarbon plasmas of pulsed capacitively coupled RF discharge (13.56 MHz). The absolute concentrations of the species were measured by means of infrared tuneable diode laser absorption spectroscopy (IR TDLAS). Time resolved (up to 300 µ s) measurements allowed one to follow the evolution of the concentrations of species during the modulation pulses. The influence of duty cycle and pulse frequency (1−100 Hz) on the gas phase chemistry was studied in different gas mixtures (CF₄−H₂, C₂F₆−H₂) at low pressures (10−100 Pa) and gas flow rates (1−10 sccm).