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DS: Dünne Schichten

DS 3: „Dünnschichtanalytik“ III (Beitr
äge)

DS 3.2: Talk

Monday, March 24, 2003, 16:05–16:20, GER/37

Growth of BaTiO(3) films and In(2)O(3):Sn/BaTiO(3) double layers — •Dieter Mergel and Kesav Reddy — Universität Essen, 45117 Essen

Thin films of BaTiO(3) (BTO) have been prepared on quartz substrates by rf magnetron sputtering at substrate temperatures between 450 and 750 ’C and at various oxygen admixtures to the Ar sputter gas. The density increases with increasing temperature. At higher temperatures, good crystalline films with (110) preferred orientation are obtained. The tetragonal structure is always found. The optical bandgap decreases with increasing crystallinity of the films.

ITO/BTO and BTO/ITO double layers have been prepared and are analyzed by XRD, optical spectroscopy, XRF and AFM.