Regensburg 2004 – wissenschaftliches Programm
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DS: Dünne Schichten
DS 18: Schichtherstellung III
DS 18.1: Vortrag
Donnerstag, 11. März 2004, 16:45–17:00, HS 31
Preparation of biaxial textured buffer layers using ion-beam assisted deposition — •R. Hühne1, S. Fähler1, W. Skrotzki2, L. Schultz1, and B. Holzapfel1 — 1Institut für Metallische Werkstoffe, IFW Dresden — 2Institut für Strukturphysik, TU Dresden
Different applications require the preparation of films on biaxial textured templates. Ion-beam assisted deposition (IBAD) offers the possibility to prepare thin textured films on amorphous or non-textured substrates. It was shown that thin cube textured MgO layers can be produced on amorphous Si3N4 using this technique [1]. To study the mechanism of texture formation in detail MgO films as well as other materials with a rocksalt structure (i.e. TiN etc.) were deposited on various amorphous substrates using ion-beam assisted pulsed laser deposition and investigated in-situ using high energy electron diffraction (RHEED). Above 250∘C a cube texture with a ⟨110⟩ direction parallel to the ion beam is observed in films thinner than 10 nm at ion incidence angles between 35∘ and 55∘. During further growth this nucleation texture changes in a way that the ⟨200⟩ direction becomes parallel to the ion beam. The texture development can be explained by a combination of thermodynamically preferred growth orientations, anisotropic sputter rates and stress induced effects. First results will be presented on the epitaxial growth of oxides as well as magnetic and superconducting layers on these biaxial textured templates.
[1] Wang et al., APL 71 (1997) 2955