Regensburg 2004 – wissenschaftliches Programm

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DS: Dünne Schichten

DS 4: Prozesscharakterisierung

DS 4.2: Vortrag

Montag, 8. März 2004, 16:15–16:30, HS 31

Time-resolved Langmuir double probe measurement in a asymmetric bipolar pulsed magnetron discharge for the deposition of MgO thin films — •Thoralf Dunger, Thomas Welzel, Hartmut Kupfer, and Frank Richter — TU Chemnitz, Institut für Physik, 09107 Chemnitz

In an asymmetric bipolar pulsed magnetron discharge which is used for MgO thin film deposition the time dependent behaviour of the charge carrier density and the electron temperature has been investigated by using a time-resolved Langmuir double probe method. The charge carrier density shows a typical temporal evolution in the ”on time” where several maxima (up to 10¹¹ cm⁻³) and minima can be observed. Between the maxima a change of one order of magnitude is possible for different discharge conditions. It was found that this temporal evolution is changed by the pulse frequency, the duty cycle and the gas mixture. The electron temperature remains nearly constant. A time evolution similar to that of the charge carrier density was only observed near the magnesium target.