Regensburg 2004 – wissenschaftliches Programm
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HL: Halbleiterphysik
HL 15: Photonische Kristalle III
HL 15.4: Vortrag
Dienstag, 9. März 2004, 11:00–11:15, H17
Photonic crystals with complete three-dimensional bandgap in macoporous silicon — •Sven Matthias1, Frank Müller1, Cécile Jamois1, Ralf B. Wehrspohn2, and Ulrich Gösele1 — 1Max Planck Institute of Microstructure Physics, Weinberg 2, Halle 06120, Germany — 2Department of Physics, University Paderborn, Warburger Str. 100, Paderborn 33098, Germany
Photonic crystals – artificial structures with periodic refractive index variations – are the No-dqsemiconductorsNo-dq for the electro-magnetic wave propagation. Suppression of spontaneous emission or loss-less waveguiding via line defects in three-dimensional photonic bandgap materials are some of the fascinating potential applications. Here, we describe the fabrication of a three-dimensional photonic crystal of overlapping air-spheres in silicon in a simple cubic lattice. Our inexpensive and fast fabrication method combines the advantages of the high accuracy of standard photolithography with a large area three-dimensional etching process. 20 lattice constants in depth and thousands lateral lattice constants with sharply modulated pores were grown and widened to obtain overlapping air-spheres in silicon. We observed the optical properties in reflection and transmission experiments along various crystal axes. They agree well with bandstructure calculations. Together with the scanning electron micrographs these are strong indications for a realised complete three-dimensional photonic bandgap of about 3 % centred at 3 microns. The large area of our structure and the variability in design enable for all-optical microchips-approaches.