Regensburg 2004 – wissenschaftliches Programm
O 23.5: Vortrag
Dienstag, 9. März 2004, 16:45–17:00, H36
NanoSAM: Instrument characterisation at ultimate SAM resolution — •Jörg Westermann, Ulrich Roll, and Georg Schäfer — OMICRON NanoTechnology GmbH, 65232 Taunusstein
During the last few years, we have developed a new electron source as an excitation source for UHV applications such as low voltage SEM, SAM / small spot Auger, cathodoluminescense and others (BMBF FKZ 13N7486/7). Finally, we now report about the first results in small spot Auger and Scanning Auger Microscopy utilising this source. We present images and spectra demonstrating the ultimate lateral resolution and energy resolution of the setup on various samples. These include gold nanoparticles on HOPG, silver islands on silicon, and semiconductor heterostructures. Furthermore, we compare the achieved results with theoretical calculations and Monte Carlo simulations at different beam energies.