Regensburg 2004 – wissenschaftliches Programm

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O: Oberflächenphysik

O 24: Nanostrukturen II

O 24.6: Vortrag

Dienstag, 9. März 2004, 17:00–17:15, H38

Nanostructuring by Erosion Sputtering: transition from dots to ripples — •Tobias Allmers, Georgi Rangelov, and Markus Donath — Physikalisches Institut, Westfälische Wilhelms-Universität Münster, Wilhelm-Klemm-Str. 10, 48149 Münster

Self-organization plays an important role for massive parallel production of nanostructures. One way of producing self-organized structures is erosion sputtering.

The generation of ripples by oblique ion impact on certain material surfaces has been known since the seventies [1]. In recent studies, self-organized patterns of hexagonal ordered quantum dots have been found after ion bombardment perpendicular to the sample surface [2].

For this contribution, we investigated the transition from dots to ripples for GaSb as a function of the incidence angle of the argon ions. The structures obtained were characterized by microscopic and spectroscopic methods.

Dots appeared up to an incidence angle of 10 relative to the surface normal. We observed that the transition between dots and ripples is not abrupt - first the hexagonal order is lost and then ripples begin to appear.

[1] Bradley and Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)

[2] Facsko et al., Science 285, 1551 (1999)

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