Regensburg 2004 – wissenschaftliches Programm

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O: Oberflächenphysik

O 24: Nanostrukturen II

O 24.6: Vortrag

Dienstag, 9. März 2004, 17:00–17:15, H38

Nanostructuring by Erosion Sputtering: transition from dots to ripples — •Tobias Allmers, Georgi Rangelov, and Markus Donath — Physikalisches Institut, Westfälische Wilhelms-Universität Münster, Wilhelm-Klemm-Str. 10, 48149 Münster

Self-organization plays an important role for massive parallel production of nanostructures. One way of producing self-organized structures is erosion sputtering.

The generation of ripples by oblique ion impact on certain material surfaces has been known since the seventies [1]. In recent studies, self-organized patterns of hexagonal ordered quantum dots have been found after ion bombardment perpendicular to the sample surface [2].

For this contribution, we investigated the transition from dots to ripples for GaSb as a function of the incidence angle of the argon ions. The structures obtained were characterized by microscopic and spectroscopic methods.

Dots appeared up to an incidence angle of 10^∘ relative to the surface normal. We observed that the transition between dots and ripples is not abrupt - first the hexagonal order is lost and then ripples begin to appear.

[1] Bradley and Harper, J. Vac. Sci. Technol. A 6, 2390 (1988)

[2] Facsko et al., Science 285, 1551 (1999)