Regensburg 2004 – wissenschaftliches Programm

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SYOH: Organic and Hybrid Systems for Future Electronics

SYOH 5: Poster

SYOH 5.9: Poster

Donnerstag, 11. März 2004, 18:00–21:00, B

Nanopatterning of Organically Modified Semiconductor Surfaces — •Thierry Djenizian, Eugen Balaur, Yan Zhang, and Patrik Schmuki — Chair for Surface Science and Corrosion, WW4, University of Erlangen-Nuremberg, Martensstrasse 7, 91058, Erlangen

The preparation, development and integration of practical electronic or bionic devices require a high degree of functionality as well as a good stability of surfaces against degradation. In this context, the nanopatterning of organically modified surfaces has attracted great attention because such functionalized surfaces offer an excellent passivation and at the same time the possibility to attach different biological species (including DNA, proteins and complex systems). In the present work, strategies for the nanopatterning of chemically modified silicon surfaces using different lithographic approaches will be presented. It will be shown that organic monolayers can be used as a new class of organic-based resists for direct electron-beam writing as well as atomic force microscope nanoscratching. The use of organic monolayers as positive or negative resists will be highlighted by exploiting the contrast in reactivity via chemical deposition (electroless technique) and plating of metals. The high resolution achieved through the use of such organic-based resists will be discussed.The processes presented here open new perspectives for selective deposition and direct patterning of Si surfaces and can be used not only for chemical and electrochemical nanogrowth but also for the nanopatterning of chemical and relevant biological species on semiconductor surfaces.