Berlin 2005 – wissenschaftliches Programm
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AKFH: Fachhochschulen
AKFH 1: Postersitzung: Forschung an Fachhochschulen
AKFH 1.12: Poster
Freitag, 4. März 2005, 14:00–15:30, Poster TU C
Thermography of micro systems — •Michael Vollmer1, Klaus-Peter Möllmann1, Norbert Lutz1, and Christian Wille2 — 1FH Brandenburg — 2Clariant GmbH
The development and optimization of micro systems such as micro actuators, micro sensors, micro reactors, micro heat exchange systems and others often require the knowledge of the temperature distribution within the micro system. The paper deals with the application of thermography in the 3.5 to 5.5 µm as well as in the 8 to 14 µm spectral band to such micro systems. The spatial resolution of the temperature measurement was as low as 60 µm and the time resolution was 20 ms. It will be shown, that this micro thermography method is a powerful tool for characterization of such micro systems with respect to first precise characterization of time dependent chemical reactions and spatial distribution of the reaction zone in glass and silicon micro reactors, second determination of heat transfer efficiency in micro heat exchange systems, third characterization of micro peltier coolers and micro cryogenic actuators, and forth characterization of temperature distribution on semiconductors gas sensors.